US Patent 8863763 Sonication cleaning with a particle counter

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88637630

Patent Inventor Names

Atul K. Trivedi0

Chaoyuan Chen0

Rhownica A. Lund0

Date of Patent

October 21, 2014

Patent Application Number

124732270

Date Filed

May 27, 2009

Patent Citations Received

‌

US Patent 12072318 Chamber component cleanliness measurement system

‌

US Patent 11772134 Sonic cleaning of brush

Patent Primary Examiner

‌

Michael Barr

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