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US Patent 12072318 Chamber component cleanliness measurement system

Patent 12072318 was granted and assigned to Lam Research on August, 2024 by the United States Patent and Trademark Office.

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Patent abstract

An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.

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