Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 2, 2007
Patent Application Number
10932083
Date Filed
September 2, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention relates to a cleaning evaluation method for evaluating a surface cleanliness of a substrate which has been cleaned after being polished. This method includes preparing a dummy substrate having a metal film formed on a surface thereof and a monitor substrate on which a cleaning evaluation is performed, and polishing the dummy substrate. After polishing the dummy substrate, the monitor substrate is polished without dressing a polishing surface of a polishing table, the monitor substrate is cleaned, and the surface cleanliness of the monitor substrate which has been cleaned is evaluated.
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