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US Patent 7155963 Cleaning evaluation method for a substrate

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Patent Citations Received
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US Patent 12072318 Chamber component cleanliness measurement system
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edited on 31 Aug, 2023
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Patent abstract

The present invention relates to a cleaning evaluation method for evaluating a surface cleanliness of a substrate which has been cleaned after being polished. This method includes preparing a dummy substrate having a metal film formed on a surface thereof and a monitor substrate on which a cleaning evaluation is performed, and polishing the dummy substrate. After polishing the dummy substrate, the monitor substrate is polished without dressing a polishing surface of a polishing table, the monitor substrate is cleaned, and the surface cleanliness of the monitor substrate which has been cleaned is evaluated.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0715596300
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US Patent 07155963 Cleaning evaluation method for a substrate US Patent 7155963 Cleaning evaluation method for a substrate

Infobox
Patent Number
0715596300
Patent Number
715596300
Edits on 2 Apr, 2023
"Entity importer update"
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Golden AI
edited on 2 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
071559630
Date of Patent
January 2, 2007
0
Patent Application Number
109320830
Date Filed
September 2, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=071559630
Patent Primary Examiner
‌
Daniel S Larkin
0
Edits on 23 Sep, 2022
"Entity importer update"
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Golden AI
edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
071559630
Date of Patent
January 2, 2007
0
Patent Application Number
109320830
Date Filed
September 2, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=071559630
Patent Primary Examiner
‌
Daniel S Larkin
0
Edits on 8 Jun, 2022
"Entity importer update"
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Golden AI
edited on 8 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07155963
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created this topic on 19 Nov, 2021
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 US Patent 07155963 Cleaning evaluation method for a substrate

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07155963
Date of patent
January 2, 2007
Patent application number
10932083
Date Filed
September 2, 2004
Patent primary examiner
‌
Daniel S Larkin

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