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US Patent 11764287 Multi-gate transistor structure

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Contents

Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11764287
Patent Inventor Names
Jhon Jhy Liaw
Date of Patent
September 19, 2023
Patent Application Number
17542979
Date Filed
December 6, 2021
Patent Citations
‌
US Patent 9887269 Multi-gate device and method of fabrication thereof
‌
US Patent 9899398 Non-volatile memory device having nanocrystal floating gate and method of fabricating same
‌
US Patent 10032627 Method for forming stacked nanowire transistors
‌
US Patent 10109721 Horizontal gate-all-around device having wrapped-around source and drain
‌
US Patent 10157799 Multi-gate device and method of fabrication thereof
‌
US Patent 10199502 Structure of S/D contact and method of making same
‌
US Patent 10290546 Threshold voltage adjustment for a gate-all-around semiconductor structure
‌
US Patent 10475902 Spacers for nanowire-based integrated circuit device and method of fabricating same
...
Patent Citations Received
‌
US Patent 12119341 Electrostatic discharge diode having dielectric isolation layer
0
Patent Primary Examiner
‌
Changhyun Yi
CPC Code
‌
H01L 29/78696
‌
H01L 29/42392
‌
H01L 2029/7858
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H01L 29/6656
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H01L 29/66553
Patent abstract

A semiconductor device according to the present disclosure includes a first channel member including a first channel portion and a first connection portion, a second channel member including a second channel portion and a second connection portion, a gate structure disposed around the first channel portion and the second channel portion, and an inner spacer feature disposed between the first connection portion and the second connection portion. The gate structure includes a gate dielectric layer and a gate electrode. The gate dielectric layer extends partially between the inner spacer feature and the first connection portion and between the inner spacer feature and the second connection portion. The gate electrode does not extend between the inner spacer feature and the first connection portion and between the inner spacer feature and the second connection portion.

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