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US Patent 11446699 Vapor phase deposition of organic films

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Edits on 29 Jul, 2023
"Resolve patent citation"
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Golden AI
edited on 29 Jul, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114466990
Date of Patent
September 20, 2022
0
Patent Application Number
168771290
Date Filed
May 18, 2020
0
Patent Citations
‌
US Patent 10014212 Selective deposition of metallic films
0
‌
US Patent 10041166 Reaction chamber passivation and selective deposition of metallic films
0
‌
US Patent 10047435 Dual selective deposition
0
‌
US Patent 10049924 Selective formation of metallic films on metallic surfaces
0
‌
US Patent 10115603 Removal of surface passivation
0
‌
US Patent 10121699 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10157786 Selective formation of metallic films on metallic surfaces
0
‌
US Patent 10186420 Formation of silicon-containing thin films
0
‌
US Patent 10204782 Combined anneal and selective deposition process
0
‌
US Patent 10316406 Methods of forming an ALD-inhibiting layer using a self-assembled monolayer
0
‌
US Patent 10343186 Vapor phase deposition of organic films
0
‌
US Patent 10373820 Deposition of organic films
0
‌
US Patent 10453701 Deposition of organic films
0
‌
US Patent 10428421 Selective deposition on metal or metallic surfaces relative to dielectric surfaces
0
‌
US Patent 10443123 Dual selective deposition
0
‌
US Patent 10480064 Reaction chamber passivation and selective deposition of metallic films
0
‌
US Patent 10546741 Selective growth method
0
‌
US Patent 10553482 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10566185 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10695794 Vapor phase deposition of organic films
0
‌
US Patent 10741411 Removal of surface passivation
0
‌
US Patent 10793946 Reaction chamber passivation and selective deposition of metallic films
0
‌
US Patent 10814349 Vapor phase deposition of organic films
0
‌
US Patent 10847361 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10847363 Method of selective deposition for forming fully self-aligned vias
0
‌
US Patent 10854460 Deposition of organic films
0
‌
US Patent 10872765 Selective layer formation using deposition and removing
0
‌
US Patent 10900120 Passivation against vapor deposition
0
‌
US Patent 10903113 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10923361 Deposition of organic films
0
Patent Primary Examiner
‌
Elizabeth A Burkhart
0
CPC Code
‌
C23C 16/45525
0
‌
H01L 51/001
0
‌
B05D 1/60
0
Edits on 29 Apr, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 29 Apr, 2023
"update citations for inverse infoboxes"
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edited on 29 Apr, 2023
Edits on 25 Apr, 2023
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edited on 25 Apr, 2023
Edits on 25 Apr, 2023
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edited on 25 Apr, 2023
Edits on 24 Apr, 2023
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edited on 24 Apr, 2023
Edits on 22 Apr, 2023
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edited on 22 Apr, 2023
Edits on 7 Apr, 2023
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edited on 7 Apr, 2023
Edits on 3 Apr, 2023
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edited on 3 Apr, 2023
Edits on 3 Apr, 2023
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edited on 3 Apr, 2023
Edits on 1 Apr, 2023
"Entity importer update"
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Golden AI
edited on 1 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114466990
Date of Patent
September 20, 2022
0
Patent Application Number
168771290
Date Filed
May 18, 2020
0
Patent Citations
‌
US Patent 10014212 Selective deposition of metallic films
0
‌
US Patent 10041166 Reaction chamber passivation and selective deposition of metallic films
0
‌
US Patent 10047435 Dual selective deposition
0
‌
US Patent 10049924 Selective formation of metallic films on metallic surfaces
0
‌
US Patent 10115603 Removal of surface passivation
0
‌
US Patent 10121699 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10157786 Selective formation of metallic films on metallic surfaces
0
‌
US Patent 10186420 Formation of silicon-containing thin films
0
‌
US Patent 10204782 Combined anneal and selective deposition process
0
‌
US Patent 10316406 Methods of forming an ALD-inhibiting layer using a self-assembled monolayer
0
‌
US Patent 10343186 Vapor phase deposition of organic films
0
‌
US Patent 10373820 Deposition of organic films
0
‌
US Patent 10453701 Deposition of organic films
0
‌
US Patent 10428421 Selective deposition on metal or metallic surfaces relative to dielectric surfaces
0
‌
US Patent 10443123 Dual selective deposition
0
‌
US Patent 10480064 Reaction chamber passivation and selective deposition of metallic films
0
‌
US Patent 10546741 Selective growth method
0
‌
US Patent 10553482 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10566185 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10695794 Vapor phase deposition of organic films
0
‌
US Patent 10741411 Removal of surface passivation
0
‌
US Patent 10793946 Reaction chamber passivation and selective deposition of metallic films
0
‌
US Patent 10814349 Vapor phase deposition of organic films
0
‌
US Patent 10847361 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10847363 Method of selective deposition for forming fully self-aligned vias
0
‌
US Patent 10854460 Deposition of organic films
0
‌
US Patent 10872765 Selective layer formation using deposition and removing
0
‌
US Patent 10900120 Passivation against vapor deposition
0
‌
US Patent 10903113 Selective deposition of aluminum and nitrogen containing material
0
‌
US Patent 10923361 Deposition of organic films
0
Patent Primary Examiner
‌
Elizabeth A Burkhart
0
CPC Code
‌
C23C 16/45525
0
‌
H01L 51/001
0
‌
B05D 1/60
0
"update citations for inverse infoboxes"
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Golden AI
edited on 1 Apr, 2023
Edits on 29 Mar, 2023
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edited on 29 Mar, 2023
Edits on 28 Mar, 2023
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edited on 28 Mar, 2023
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Golden AI
edited on 28 Mar, 2023
Edits on 27 Mar, 2023
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Golden AI
edited on 27 Mar, 2023
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Golden AI
edited on 27 Mar, 2023
Edits on 23 Mar, 2023
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edited on 23 Mar, 2023
Edits on 6 Oct, 2022
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edited on 6 Oct, 2022
Edits on 28 Sep, 2022
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Golden AI
edited on 28 Sep, 2022

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