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US Patent 10236156 Apparatus of plural charged-particle beams

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
March 23, 2016
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Date of Patent
March 19, 2019
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Patent Application Number
15078369
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Patent Citations Received
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US Patent 11887807 Apparatus of plural charged-particle beams
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US Patent 11232928 Multi-beam inspection apparatus
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US Patent 11587758 Apparatus of plural charged-particle beams
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US Patent 11289304 Apparatus using multiple beams of charged particles
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US Patent 11694868 Multi-beam image acquisition apparatus and multi-beam image acquisition method
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US Patent 11366072 Detecting backscattered electrons in a multibeam charged particle column
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US Patent 11804356 Apparatus using multiple beams of charged particles
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US Patent RE49784 Apparatus of plural charged-particle beams
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Patent Inventor Names
Jack Jau
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Xuedong Liu
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Zhongwei Chen
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Shuai Li
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Weiming Ren
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
10236156
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Patent Primary Examiner
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Phillip A Johnston
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