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US Patent 11366072 Detecting backscattered electrons in a multibeam charged particle column

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Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

June 21, 2022

Patent Application Number

16866329

Date Filed

May 4, 2020

Patent Citations

US Patent 10236156 Apparatus of plural charged-particle beams

US Patent 10347460 Patterned substrate imaging using multiple electron beams

US Patent 10325753 Method and system for focus adjustment of a multi-beam scanning electron microscopy system

US Patent 10366862 Method and system for noise mitigation in a multi-beam scanning electron microscopy system

US Patent 10811222 Apparatus of plural charged-particle beams

US Patent 10460905 Backscattered electrons (BSE) imaging using multi-beam tools

Patent Citations Received

US Patent 11996265 System and method for generating and analyzing roughness measurements and their use for process monitoring and control

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US Patent 11670480 System and method for generating and analyzing roughness measurements

0

US Patent 11664188 Edge detection system

0

Patent Primary Examiner

CPC Code

H01J 2237/24475

H01J 2237/24465

A method and a system for detecting backscattered electrons in a multi-beam electron column.

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