Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Zhong-wei Chen0
Weiming Ren0
Xuerang Hu0
Xuedong Liu0
Date of Patent
January 2, 2024
0Patent Application Number
170052120
Date Filed
August 27, 2020
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A new multi-beam apparatus with a total FOV variable in size, orientation and incident angle, is proposed. The new apparatus provides more flexibility to speed the sample observation and enable more samples observable. More specifically, as a yield management tool to inspect and/or review defects on wafers/masks in semiconductor manufacturing industry, the new apparatus provide more possibilities to achieve a high throughput and detect more kinds of defects.
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