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US Patent D944946 Shower plate
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Patent
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Date Filed
June 14, 2019
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Date of Patent
March 1, 2022
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Patent Application Number
29695044
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Patent Citations
US Patent 10018920 Lithography patterning with a gas phase resist
US Patent 10023960 Process gas management for an inductively-coupled plasma deposition reactor
US Patent 10032792 Semiconductor device and manufacturing method thereof
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US Patent 10043661 Method for protecting layer by forming hydrocarbon-based extremely thin film
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US Patent 10047435 Dual selective deposition
US Patent 10053774 Reactor system for sublimation of pre-clean byproducts and method thereof
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US Patent 10060473 Energy conversion systems and methods
US Patent 10083836 Formation of boron-doped titanium metal films with high work function
US Patent 10087522 Deposition of metal borides
US Patent 10087525 Variable gap hard stop design
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Patent Citations Received
US Patent D989012 Elastic membrane
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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication
0
US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device
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US Patent D1021832 Elastic membrane
0
US Patent D1030844 Lens cap for camera
0
Patent Inventor Names
Wataru Adachi
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Takafumi Hisamitsu
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
D944946
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Patent Primary Examiner
Amy C Wierenga
0
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