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US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device

Patent D1012051 was granted and assigned to Tokyo Electron on January, 2024 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Tokyo Electron

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D10120510

Patent Inventor Names

Yasuharu Sasaki0

Masato Takayama0

Date of Patent

January 23, 2024

Patent Application Number

297158630

Date Filed

December 5, 2019

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US Patent D902165 Target profile for a physical vapor deposition chamber target

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