US Patent D716742 Substrate supporter for semiconductor deposition apparatus

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D716742

Patent Inventor Names

Dae Youn Kim0

Hak Yong Kwon0

Hyun Soo Jang0

Jeong Ho Lee0

Seung Seob Lee0

Date of Patent

November 4, 2014

Patent Application Number

29484670

Date Filed

March 12, 2014

Patent Citations Received

‌

US Patent D1007449 Target profile for a physical vapor deposition chamber target

‌

US Patent D1012051 Electrostatic chuck for semiconductor manufacturing device

Patent Primary Examiner

‌

Elizabeth J Oswecki

No article content yet.

Timeline

No Timeline data yet.

Further Resources

Title

Author

Link

Type

Date

No Further Resources data yet.

References

Find more entities like US Patent D716742 Substrate supporter for semiconductor deposition apparatus

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.

Open Query Tool

Access by API