US Patent 7989778 Charged-particle optical system with dual loading options
Patent 7989778 was granted and assigned to FEI Company on August, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 29, 2009
Date of Patent
August 2, 2011
Patent Application Number
12608380
Patent Citations Received
Patent Inventor Names
Jorn Hermkens
2
Wim Wondergem
2
Frank Nederlof
2
Johannes Antonius Maria Van Den Oetelaar
2
Pleun Dona
2
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Industry
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