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US Patent 12020895 Systems and apparatuses for contamination-free vacuum transfer of samples

Patent 12020895 was granted and assigned to FEI Company on June, 2024 by the United States Patent and Trademark Office.

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Contents

Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Applicant
FEI Company
FEI Company
1
Current Assignee
FEI Company
FEI Company
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
120208951
Patent Inventor Names
John M. Mitchels1
Jakub Kuba1
Michal Valík1
Jakub Drahotský1
Date of Patent
June 25, 2024
1
Patent Application Number
176663851
Date Filed
February 7, 2022
1
Patent Citations
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US Patent 7989778 Charged-particle optical system with dual loading options
1
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US Patent 7034316 Sample carrier for carrying a sample to be irradiated with an electron beam
1
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US Patent 7767979 Method for coupling and disconnecting a co-operative composite structure of a sample carrier and a sample holder
1
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US Patent 9837246 Reinforced sample for transmission electron microscope
1
Patent Primary Examiner
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Jason L McCormack
1
CPC Code
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H01J 2237/184
1
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H01J 2237/186
1
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H01J 2237/2002
1
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H01J 2237/2003
1
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H01J 2237/208
1
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H01J 49/0409
1
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G01N 1/42
1
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H01J 37/20
1
...
Patent abstract

Various approaches are provided for contamination-free vacuum transfer of samples. As one example, an apparatus includes a compartment configured to store multiple samples held by a cartridge removably coupled to the compartment, a sample port for transferring the cartridge between a charged particle system and a position within the compartment, and a valve configured to seal the compartment at vacuum pressure during transport of the multiple samples between charged particle systems. In this way, samples such as lamellae may be transferred between charged particle systems while maintaining the samples at vacuum pressure, thereby reducing the possibility of sample contamination during sample transfer.

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