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US Patent 7989778 Charged-particle optical system with dual loading options

Patent 7989778 was granted and assigned to FEI Company on August, 2011 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
FEI Company
FEI Company
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7989778
Patent Inventor Names
Jorn Hermkens2
Wim Wondergem2
Frank Nederlof2
Johannes Antonius Maria Van Den Oetelaar2
Pleun Dona2
Date of Patent
August 2, 2011
Patent Application Number
12608380
Date Filed
October 29, 2009
Patent Citations Received
‌
US Patent 12020895 Systems and apparatuses for contamination-free vacuum transfer of samples
1
Patent Primary Examiner
‌
Bernard E Souw
Patent abstract

A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.

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