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US Patent 7967995 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

Patent 7967995 was granted and assigned to Tokyo Electron on June, 2011 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 11921433 Optical metrology in machine learning to characterize features
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Patent abstract

The invention provides a method of processing a substrate using multilayer processing sequences and Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models and libraries that can include one or more masking layer creation procedures, one or more pre-processing measurement procedures, one or more Partial-Etch (P-E) procedures, one or more Final-Etch (F-E) procedures, and one or more post-processing measurement procedures.

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Patent Inventor Names
Asao Yamashita0
Daniel Prager0
Hyung Joo Lee0
Merritt Funk0
Radha Sundararajan0
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Patent Citations Received
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US Patent 11704463 Method of etch model calibration using optical scatterometry
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US Patent 07967995 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using US Patent 7967995 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

Infobox
Patent Number
079679950
Patent Number
79679950
Edits on 3 Apr, 2023
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edited on 3 Apr, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Tokyo Electron
Tokyo Electron
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
079679950
Date of Patent
June 28, 2011
0
Patent Application Number
120596240
Date Filed
March 31, 2008
0
Patent Primary Examiner
‌
Allan Olsen
0
Edits on 8 Dec, 2021
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created this topic on 8 Dec, 2021
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 US Patent 07967995 Multi-layer/multi-input/multi-output (MLMIMO) models and method for using

Infobox
Is a
Patent
Patent
Current assignee
Tokyo Electron
Tokyo Electron
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07967995
Date of patent
June 28, 2011
Patent application number
12059624
Date Filed
March 31, 2008
Patent primary examiner
‌
Allan Olsen

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