US Patent 7792350 Wafer center finding
Patent 7792350 was granted and assigned to Brooks Automation on September, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
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US Patent 07792350 Wafer center finding US Patent 7792350 Wafer center finding
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Patent Number
0779235000
Patent Number
779235000
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
077923500
Date of Patent
September 7, 2010
0Patent Application Number
116823060
Date Filed
March 5, 2007
0Official Website
Patent Primary Examiner
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
077923500
Date of Patent
September 7, 2010
0Patent Application Number
116823060
Date Filed
March 5, 2007
0Official Website
Patent Primary Examiner
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US Patent 07792350 Wafer center finding
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07792350
Date of patent
September 7, 2010
Patent application number
11682306
Date Filed
March 5, 2007
Patent primary examiner
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