Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matvey Farber0
Jeffrey Hudgens0
Nicholas Michael Kopec0
Lyle Kosinski0
Date of Patent
September 3, 2024
0Patent Application Number
178502960
Date Filed
June 27, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
An autoteach system includes an autoteach pin that is a scannable feature having a fixed position within the autoteach system. The autoteach pin enables an autoteach operation of a robot arm of the wafer processing system. The autoteach operation is an operation to automatically teach the fixed position within the autoteach system to the robot arm of the wafer processing system. The autoteach pin includes a first portion including a cylindrical sidewall. The robot arm is to use the first portion to locate the fixed position within the autoteach system. The autoteach portion further includes a second portion including planar sidewalls that are configured to enable calibration of robot arm error.
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