Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Damon Genetti0
Mikhail Bojinov0
Stephan Minard0
Wayne Tang0
Date of Patent
August 23, 2005
0Patent Application Number
106006670
Date Filed
June 20, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.
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