Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Helder Lee0
Damon K. Cox0
Nicholas Michael Kopec0
Jeffrey Hudgens0
Denis Martin Koosau0
Douglas R. McAllister0
Steven Babayan0
Andreas Schmid0
...
Date of Patent
December 12, 2023
0Patent Application Number
172164390
Date Filed
March 29, 2021
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the process kit ring is configured to be transported on the end effector within a processing system.
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