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US Patent 11842917 Process kit ring adaptor

Patent 11842917 was granted and assigned to Applied Materials on December, 2023 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
Applied Materials
Applied Materials
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Date Filed
March 29, 2021
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Date of Patent
December 12, 2023
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Patent Applicant
Applied Materials
Applied Materials
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Patent Application Number
17216439
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Patent Citations
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US Patent 8784033 Robot systems, apparatus and methods for transporting substrates
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US Patent D616389 Vacuum contact pad
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US Patent 7792350 Wafer center finding
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US Patent 8384033 Quantification of an absorber through a scattering medium
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US Patent 8397739 N-channel flow ratio controller calibration
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US Patent D684546 Electroluminescence module
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US Patent 9457464 Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing
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US Patent 9462732 Electromagnetic interference shielding (EMI) apparatus including a frame with drawn latching features
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US Patent 9547769 Data protection hub
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US Patent 9579788 Automated testing and verification of a robotic system
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•••
Patent Inventor Names
Helder Lee
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Damon K. Cox
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Nicholas Michael Kopec
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Jeffrey Hudgens
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Denis Martin Koosau
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Douglas R. McAllister
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Steven Babayan
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Andreas Schmid
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Leon Volfovski
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11842917
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Patent Primary Examiner
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Ronald P Jarrett
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CPC Code
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C23C 16/4585
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C23C 16/4584
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H01L 21/67706
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H01J 37/32642
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H01L 21/68707
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H01L 21/68735
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H01L 21/68742
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