US Patent 7780867 Edge bevel removal of copper from silicon wafers
Patent 7780867 was granted and assigned to Novellus Systems on August, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 11, 2005
0
Date of Patent
August 24, 2010
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Patent Application Number
11248874
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Patent Inventor Names
Douglas A. Preston
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Seshasayee Varadarajan
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Steven T. Mayer
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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