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US Patent 7767106 Method of dry etching oxide semiconductor film

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
July 10, 2007
Date of Patent
August 3, 2010
Patent Application Number
11775561
Patent Citations Received
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US Patent 12074210 Semiconductor device and method for manufacturing the same
0
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US Patent 11978742 Metal oxide film and method for forming metal oxide film
0
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US Patent 12009434 Semiconductor device including transistors and method for manufacturing the same
0
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US Patent 11894486 Method for manufacturing semiconductor device
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7767106
Patent Primary Examiner
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Binh X Tran

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