US Patent 7596841 Micro-electromechanical devices and methods of fabricating thereof
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Patent Inventor Names
Jian Zhang0
Kui Yao0
Peng Gao0
Santiranjan Shannigrahi0
Xiao Song Eric Tang0
Xujiang He0
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Patent abstract
An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
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US Patent 07596841 Micro-electromechanical devices and methods of fabricating thereof US Patent 7596841 Micro-electromechanical devices and methods of fabricating thereof
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Patent Number
075968410
Patent Number
75968410
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Patent Jurisdiction
Patent Number
075968410
Date of Patent
October 6, 2009
0Patent Application Number
115681140
Date Filed
April 23, 2004
0Official Website
Patent Primary Examiner
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US Patent 07596841 Micro-electromechanical devices and methods of fabricating thereof
Infobox
Is a
Patent jurisdiction
Patent number
07596841
Date of patent
October 6, 2009
Patent application number
11568114
Date Filed
April 23, 2004
Patent primary examiner
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