Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Xiao Song Eric Tang0
Santiranjan Shannigrahi0
Xujiang He0
Jian Zhang0
Kui Yao0
Peng Gao0
Date of Patent
October 6, 2009
0Patent Application Number
115681140
Date Filed
April 23, 2004
0Patent Primary Examiner
Patent abstract
An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.
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