US Patent 7596841 Micro-electromechanical devices and methods of fabricating thereof
Is a
Date Filed
April 23, 2004
1
Date of Patent
October 6, 2009
1
Patent Application Number
11568114
1
Patent Inventor Names
Xiao Song Eric Tang
1
Santiranjan Shannigrahi
1
Xujiang He
1
Jian Zhang
1
Kui Yao
1
Peng Gao
1
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7596841 Micro-electromechanical devices and methods of fabricating thereof
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.