US Patent 7513262 Substrate meniscus interface and methods for operation
Patent 7513262 was granted and assigned to Lam Research on April, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 1, 2004
0
Date of Patent
April 7, 2009
0
Patent Application Number
10817620
0
Patent Inventor Names
Carl Woods
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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