US Patent 7513262 Substrate meniscus interface and methods for operation

Patent 7513262 was granted and assigned to Lam Research on April, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Lam Research

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

75132620

Patent Inventor Names

Carl Woods0

Date of Patent

April 7, 2009

Patent Application Number

108176200

Date Filed

April 1, 2004

Patent Primary Examiner

‌

Joseph L. Perrin

Patent abstract

An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate is provided which includes a docking surface configured to be placed adjacent to an edge of the substrate where the docking surface is in the same plane as the substrate. The docking surface provides a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate.