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US Patent 7513262 Substrate meniscus interface and methods for operation

Patent 7513262 was granted and assigned to Lam Research on April, 2009 by the United States Patent and Trademark Office.

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Patent Inventor Names
Carl Woods0
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Patent abstract

An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate is provided which includes a docking surface configured to be placed adjacent to an edge of the substrate where the docking surface is in the same plane as the substrate. The docking surface provides a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate.

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US Patent 07513262 Substrate meniscus interface and methods for operation US Patent 7513262 Substrate meniscus interface and methods for operation

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Patent Number
075132620
Patent Number
75132620
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075132620
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Infobox
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075132620
Date of Patent
April 7, 2009
0
Patent Application Number
108176200
Date Filed
April 1, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075132620
Patent Primary Examiner
‌
Joseph L. Perrin
0
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07513262
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 US Patent 07513262 Substrate meniscus interface and methods for operation

Infobox
Is a
Patent
Patent
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07513262
Date of patent
April 7, 2009
Patent application number
10817620
Date Filed
April 1, 2004
Patent primary examiner
‌
Joseph L. Perrin

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