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US Patent 7408329 Power supply unit for gas discharge processes

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US Patent 12125673 Pulsed voltage source for plasma processing applications

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US Patent 12111341 In-situ electric field detection method and apparatus

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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber

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US Patent 11972924 Pulsed voltage source for plasma processing applications

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US Patent 11967483 Plasma excitation with ion energy control

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US Patent 11948780 Automatic electrostatic chuck bias compensation during plasma processing

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US Patent 11887813 Pulsed voltage source for plasma processing

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US Patent 11791138 Automatic electrostatic chuck bias compensation during plasma processing

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US Patent 11776789 Plasma processing assembly using pulsed-voltage and radio-frequency power

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US Patent 11776788 Pulsed voltage boost for substrate processing

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Patent Inventor Names

Markus Winterhalter0

Peter Wiedemuth0

Stefan Schirmaier0

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Patent abstract

A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=074083290

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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform

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US Patent 07408329 Power supply unit for gas discharge processes US Patent 7408329 Power supply unit for gas discharge processes

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Patent Number

074083290

Patent Number

74083290

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Is a

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

074083290

Date of Patent

August 5, 2008

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Patent Application Number

112264730

Date Filed

September 15, 2005

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=074083290

Patent Primary Examiner

0

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Website URL

https://pdfpiw.uspto.gov/.piw?Docid=07408329

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US Patent 07408329 Power supply unit for gas discharge processes

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Is a

Patent jurisdiction

United States Patent and Trademark Office

Patent number

07408329

Date of patent

August 5, 2008

Patent application number

11226473

Date Filed

September 15, 2005

Patent primary examiner

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