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US Patent 12111341 In-situ electric field detection method and apparatus

Patent 12111341 was granted and assigned to Applied Materials on October, 2024 by the United States Patent and Trademark Office.

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Applicant
Applied Materials
Applied Materials
1
Current Assignee
Applied Materials
Applied Materials
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
121113411
Patent Inventor Names
Fernando Silveira1
Kartik Ramaswamy1
Yang Yang1
Yue Guo1
A N M Wasekul Azad1
Date of Patent
October 8, 2024
1
Patent Application Number
179606661
Date Filed
October 5, 2022
1
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US Patent 6962664 Controlled method for segmented electrode apparatus and method for plasma processing
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US Patent 6970042 Power control for high frequency amplifiers
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US Patent 6972524 Plasma processing system control
1
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US Patent 7016620 Method and device for controlling a print process with high color density
1
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US Patent 7046088 Power amplifier
1
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US Patent 7059267 Use of pulsed grounding source in a plasma reactor
1
...
Patent Primary Examiner
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Christopher P McAndrew
1
CPC Code
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G01R 29/0885
1
Patent abstract

Embodiments of the disclosure include an electric field measurement system that includes a first light source, a first light sensor configured to receive electromagnetic energy transmitted from the first light source, an electro-optic sensor, and a controller. The electro-optic sensor may include a package comprising a first electro-optic crystal disposed within a body; and at least one optical fiber. The optical fiber is configured to transmit electromagnetic energy transmitted from the first light source to a surface of the first electro-optic crystal, and transmit at least a portion of the electromagnetic energy transmitted to the surface of the first electro-optic crystal and subsequently passed through at least a portion of the first electro-optic crystal to the first light sensor that is configured to generate a signal based on an attribute of the electromagnetic energy received by the first light sensor from the at least one optical fiber. The controller is configured to generate a command signal based on a signal received from the first light sensor.

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