Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Eitan Kidron0
Igal Ben-Dayan0
Igor Krivts (Krayvitz)0
Igor Petrov0
Guy Eitan0
Date of Patent
January 8, 2008
0Patent Application Number
111193160
Date Filed
April 28, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Wafer supporting apparatus, including an electrostatic chuck for supporting the wafer. The apparatus further includes an electrostatic shield which is positioned in proximity to the chuck and the wafer, and a voltage source which is coupled to apply an electric field between the chuck and the wafer. The voltage source applies one or more potentials to the electrostatic shield so as to prevent penetration of particles to the wafer.
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