Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Maolin Long0
Date of Patent
June 4, 2024
0Patent Application Number
175512470
Date Filed
December 15, 2021
0Patent Citations
...
Patent Primary Examiner
Patent abstract
An electrostatic chuck including a workpiece support surface, clamping layer, heating layer, thermal control system, and sealing band is disclosed. The sealing band surrounds an outer perimeter of the electrostatic chuck including at least a portion of the workpiece surface. The sealing band has a width greater than about 3 millimeters (mm) up to about 10 mm. Plasma processing apparatuses and systems incorporating the electrostatic chuck are also provided.
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