US Patent 7045014 Substrate support assembly
Patent 7045014 was granted and assigned to Applied Materials on May, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 24, 2003
0
Date of Patent
May 16, 2006
0
Patent Application Number
10423717
0
Patent Citations Received
Patent Inventor Names
Abhijit Desai
0
Christopher Richard Mahon
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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