Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Abhijit Desai0
Christopher Richard Mahon0
Date of Patent
May 16, 2006
0Patent Application Number
104237170
Date Filed
April 24, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.
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