US Patent 7045014 Substrate support assembly
Patent 7045014 was granted and assigned to Applied Materials on May, 2006 by the United States Patent and Trademark Office.
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Patent abstract
A substrate support assembly supports a substrate in a process chamber. The substrate support assembly has a support block having an electrode and an arm to hold the support block in the process chamber, the arm having a channel therethrough. The arm has a first clamp to attach to the support block and a second clamp to attach to the process chamber. A plurality of electrical conductors pass through the channel of the arm, and a ceramic insulator is between the conductors.
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Patent Inventor Names
Abhijit Desai0
Christopher Richard Mahon0
Date of Patent
May 16, 2006
0Patent Application Number
104237170
Date Filed
April 24, 2003
0Patent Primary Examiner
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US Patent 7045014 Substrate support assembly
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