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US Patent 12131884 Pulse and bias synchronization methods and systems

Patent 12131884 was granted and assigned to MKS Instruments on October, 2024 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
MKS Instruments
MKS Instruments
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Date Filed
December 20, 2022
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Date of Patent
October 29, 2024
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Patent Applicant
MKS Instruments
MKS Instruments
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Patent Application Number
18084696
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Patent Citations
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US Patent 10546724 Pulsed, bidirectional radio frequency source/load
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US Patent 10821542 Pulse synchronization by monitoring power in another frequency band
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US Patent 11232931 Intermodulation distortion mitigation using electronic variable capacitor
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US Patent 11315757 Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications
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US Patent 11536755 System and method for arc detection using a bias RF generator signal
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US Patent 11527384 Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
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US Patent 7602127 Phase and frequency control of a radio frequency generator from an external source
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US Patent 8110991 Phase and frequency control of a radio frequency generator from an external source
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US Patent 8395322 Phase and frequency control of a radio frequency generator from an external source
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US Patent 9947514 Plasma RF bias cancellation system
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•••
Patent Inventor Names
Michael Kirk
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Aaron Burry
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Mariusz Oldziej
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Aaron Radomski
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12131884
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Patent Primary Examiner
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Jeffrey S Zweizig
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