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US Patent 12131884 Pulse and bias synchronization methods and systems

Patent 12131884 was granted and assigned to MKS Instruments on October, 2024 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
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Patent attributes

Patent Applicant
MKS Instruments
MKS Instruments
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Current Assignee
MKS Instruments
MKS Instruments
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
121318840
Patent Inventor Names
Michael Kirk0
Aaron Burry0
Mariusz Oldziej0
Aaron Radomski0
Date of Patent
October 29, 2024
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Patent Application Number
180846960
Date Filed
December 20, 2022
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Patent Citations
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US Patent 10546724 Pulsed, bidirectional radio frequency source/load
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US Patent 10821542 Pulse synchronization by monitoring power in another frequency band
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US Patent 11232931 Intermodulation distortion mitigation using electronic variable capacitor
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US Patent 11315757 Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications
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US Patent 11536755 System and method for arc detection using a bias RF generator signal
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US Patent 11527384 Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
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US Patent 7602127 Phase and frequency control of a radio frequency generator from an external source
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US Patent 8110991 Phase and frequency control of a radio frequency generator from an external source
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...
Patent Primary Examiner
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Jeffrey S Zweizig
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Patent abstract

A radio frequency (RF) generator includes a RF power source configured to output an RF power signal, and a controller coupled to the RF power source. The controller is configured to generate a pulse to modulate the RF power signal of the RF power source. The pulse includes one or more state transitions. The controller is further configured to receive a sync signal indicative of one or more operating characteristics or parameters of another RF generator, and adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received sync signal. Other example RF generators, RF power delivery systems including one or more RF generators, and control methods for adjusting a state transition of a pulse to synchronize the state transition with a defined phase of a sync signal are also disclosed.

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