US Patent 12072640 Cleaning system, exposure machine, and cleaning method
Patent 12072640 was granted and assigned to ChangXin Memory Technologies on August, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 14, 2022
0
Date of Patent
August 27, 2024
0
Patent Applicant
Patent Application Number
17839824
0
Patent Citations
•••
Patent Inventor Names
Xueyu Liang
0
Lulu Fang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
CPC Code
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