Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 13, 2015
Patent Application Number
13032222
Date Filed
February 22, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentration of up to 10 ppm, or (e) any combination selected from (a)-(d).
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