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US Patent 11984236 Radiation system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
January 15, 2020
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Date of Patent
May 14, 2024
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Patent Application Number
16743025
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Patent Citations
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US Patent 7800734 Lighting apparatus, exposure apparatus and microdevice manufacturing method
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US Patent 7948678 Four-region catadioptric tile
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US Patent 8579492 Optical film having microreplicated structures and methods
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US Patent 9134613 Illumination and displacement device for a projection exposure apparatus
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US Patent 9835950 Radiation source
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US Patent 7329886 EUV illumination system having a plurality of light sources for illuminating an optical element
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US Patent 7023953 Illumination system and exposure apparatus and method
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US Patent 7326948 Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method
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US Patent 6927887 Holographic illuminator for synchrotron-based projection lithography systems
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US Patent 7054068 Lens array sheet and transmission screen and rear projection type display
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Patent Inventor Names
Rilpho Ludovicus Donker
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Gosse Charles De Vries
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Han-Kwang Nienhuys
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11984236
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Patent Primary Examiner
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Christina A Riddle
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CPC Code
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G03F 7/70025
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G03F 7/70033
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G03F 7/70058
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G03F 7/70083
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G03F 7/70091
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G03F 7/70108
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G03F 7/70116
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G03F 7/70125
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G03F 7/70141
0
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G03F 7/702
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