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US Patent 11984236 Radiation system

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
119842361
Patent Inventor Names
Rilpho Ludovicus Donker1
Gosse Charles De Vries1
Han-Kwang Nienhuys1
Date of Patent
May 14, 2024
1
Patent Application Number
167430251
Date Filed
January 15, 2020
1
Patent Citations
‌
US Patent 7800734 Lighting apparatus, exposure apparatus and microdevice manufacturing method
1
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US Patent 7948678 Four-region catadioptric tile
1
‌
US Patent 8579492 Optical film having microreplicated structures and methods
1
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US Patent 9134613 Illumination and displacement device for a projection exposure apparatus
1
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US Patent 9835950 Radiation source
1
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US Patent 7329886 EUV illumination system having a plurality of light sources for illuminating an optical element
1
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US Patent 7023953 Illumination system and exposure apparatus and method
1
‌
US Patent 7326948 Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method
1
...
Patent Primary Examiner
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Christina A Riddle
1
CPC Code
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G03F 7/70025
1
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G03F 7/70033
1
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G03F 7/70058
1
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G03F 7/70083
1
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G03F 7/70091
1
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G03F 7/70108
1
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G03F 7/70116
1
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G03F 7/70125
1
...
Patent abstract

A radiation system includes a beam splitting apparatus configured to split a main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.

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