Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hideki Komatsuda0
Date of Patent
April 4, 2006
0Patent Application Number
106877700
Date Filed
October 20, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An optical apparatus and method guide EUV radiation to a predetermined surface. A radiation source supplies EUV radiation having a certain dispersion angle. An illumination optical system having a reflective integrator forms a secondary radiation source having a predetermined shape based on the EUV radiation supplied from the radiation source. A projection optical system is arranged in an optical path between a reflective mask and the predetermined surface and forms an image of the reflective mask onto the predetermined surface based on the EUV radiation from the reflective mask. The secondary radiation source having the predetermined shape has a shape that is a substantially circular shape, an annular shape, or a multipolar shape.
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