US Patent 11978655 Substrate transfer mechanism and substrate transferring method
Patent 11978655 was granted and assigned to Tokyo Electron on May, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 24, 2023
0
Date of Patent
May 7, 2024
0
Patent Applicant
Patent Application Number
18201270
0
Patent Citations
Patent Inventor Names
Kousei Ide
0
Naruaki Iida
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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