US Patent 11946132 Chalcogenide sputtering target and method of making the same
Patent 11946132 was granted and assigned to HONEYWELL INTERNATIONAL INC on April, 2024 by the United States Patent and Trademark Office.
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US Patent 11946132 Chalcogenide sputtering target and method of making the same
Article
Patent abstract
In one embodiment, a physical vapor deposition device includes a phase change material sputtering target includes a primary matrix and at least one additional phase. The primary matrix includes at least one element from Group VI of the periodic table excluding oxygen and one or more elements from Group IV or Group V of the periodic table. The additional phase is substantially homogenously dispersed in the primary matrix.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael R. Pinter0
Date of Patent
April 2, 2024
0Patent Application Number
171142160
Date Filed
December 7, 2020
0Patent Citations
Patent Primary Examiner
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