Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael R. Pinter0
Date of Patent
April 2, 2024
0Patent Application Number
171142160
Date Filed
December 7, 2020
0Patent Citations
...
Patent Primary Examiner
Patent abstract
In one embodiment, a physical vapor deposition device includes a phase change material sputtering target includes a primary matrix and at least one additional phase. The primary matrix includes at least one element from Group VI of the periodic table excluding oxygen and one or more elements from Group IV or Group V of the periodic table. The additional phase is substantially homogenously dispersed in the primary matrix.
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