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US Patent 11916534 Microelectromechanical resonator

Patent 11916534 was granted and assigned to SiTime on February, 2024 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
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Current Assignee
SiTime
SiTime
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Date Filed
June 23, 2022
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Date of Patent
February 27, 2024
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Patent Applicant
SiTime
SiTime
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Patent Application Number
17847438
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Patent Citations
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US Patent 7439658 Piezoelectric vibrator, oscillator, electronic part, electronic apparatus, method of fabricating piezoelectric vibrator and method of fabricating electronic part
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US Patent 7202761 Temperature compensation for silicon MEMS resonator
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US Patent 7369003 Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same
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US Patent 7369004 Microelectromechanical oscillator and method of operating same
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US Patent 7443258 Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same
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US Patent 7446619 Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same
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US Patent 7446620 Microelectromechanical oscillator having temperature measurement system, and method of operating same
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US Patent 7545228 Dynamic temperature compensation for a digitally controlled oscillator using dual MEMS resonators
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US Patent 7586239 MEMS vibrating structure using a single-crystal piezoelectric thin film layer
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US Patent 7639104 Method for temperature compensation in MEMS resonators with isolated regions of distinct material
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•••
Patent Inventor Names
Paul M. Hagelin
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Charles I. Grosjean
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Joseph C. Doll
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Nicholas Miller
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Ginel C. Hill
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11916534
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Patent Primary Examiner
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Jeffrey M Shin
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CPC Code
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H03H 9/2463
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H03H 3/0077
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H03H 2003/027
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H03H 2009/02181
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H03H 2009/02307
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H03H 2009/155
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H03H 9/17
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H03H 9/1057
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H03H 9/02448
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H03H 9/02401
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•••

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