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US Patent 7369004 Microelectromechanical oscillator and method of operating same

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Contents

Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
73690040
Patent Inventor Names
Paul Merritt Hagelin0
Aaron Partridge0
Bernhard E. Boser0
Crist Y. Lu0
Markus Lutz0
Date of Patent
May 6, 2008
0
Patent Application Number
114937040
Date Filed
July 26, 2006
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Patent Citations Received
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US Patent 12088441 Systems and methods for real-time frequency shift detection
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US Patent 11677379 Microelectromechanical resonator
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US Patent 11770112 MEMS resonator with co-located temperature sensor
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US Patent 11909376 Piezo-actuated MEMS resonator
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US Patent 11909354 Ovenized MEMS
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US Patent 11916534 Microelectromechanical resonator
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US Patent 11975965 MEMS resonator
0
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US Patent 11990908 Dual-MEMS device with temperature correction of MEMS output based on relative MEMS operation
0
Patent Primary Examiner
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Robert J Pascal
0
Patent abstract

There are many inventions described and illustrated herein. In one aspect, the present inventions relate to a temperature measurement system comprising (1) a first microelectromechanical resonator to generate a first output signal having a frequency that varies with operating temperature, wherein the first microelectromechanical resonator includes a frequency function of temperature; (2) a second microelectromechanical resonator to generate a second output signal having a frequency that varies with operating temperature, wherein the second microelectromechanical resonator includes a frequency function of temperature; and (3) frequency division circuitry, coupled to the first and second microelectromechanical resonators, to determine data which is representative of the operating temperature of the first and/or second microelectromechanical resonator using (i) data which is representative of the frequency of the first output signal and (ii) data which is representative of the frequency of the second output signal. The frequency division circuitry may include circuitry to divide the frequency of the first output signal by the frequency of the second output signal (whether in digital or analog domain).

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