US Patent 11912730 Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films
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US Patent 11912730 Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films
Article
Patent abstract
Amino-functionalized cyclic oligosiloxanes, which have at least three silicon and three oxygen atoms as well as at least one organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized cyclic oligosiloxanes are also disclosed.
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Patent Inventor Names
John F. Lehmann0
Matthew R. MacDonald0
Date of Patent
February 27, 2024
0Patent Application Number
180669030
Date Filed
December 15, 2022
0Patent Citations
Patent Primary Examiner
CPC Code
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