Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Meiliang Wang0
Manchao Xiao0
Matthew R. MacDonald0
Xinjian Lei0
Date of Patent
August 24, 2021
Patent Application Number
20190405
Date Filed
April 5, 2019
Patent abstract
Organoamino-functionalized cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the organoamino-functionalized cyclic oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized cyclic oligosiloxanes are also disclosed.
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